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Showing 1 to 1 of 1 for “"Fabricating masks"”.
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A study of mechanical forces induced by low-energy (10-100 eV) electron irradiation of alkanethiol self-assembled monolayers on Au(111)
… is widely used in various applications such as fabricating masks for nano-imprint lithography, manufacturing cross linked polymers and synthesizing novel chemicals. Low-energy secondary electrons scattered from the incident high-energy source in lithography and other techniques may introduce …