Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 27 for “"Extreme Ultraviolet (EUV)"”.
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Magnetically levitated hysteresis motor driven linear stage for in-vacuum transportation tasks
… in-vacuum reticle transportation mechanism for extreme ultraviolet (EUV) photolithography machines. In the photolithography process, the reticle is a quartz plate that contains a pattern of the integrated circuit, which needs to be transported between a storage position and the exposure stage. …
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Extreme ultraviolet polarization optics for polarimetry of structured high harmonics
… is a leading way to generate table-top coherent extreme ultraviolet (EUV) and attosecond pulses. Polarization characterization in this spectral range is important to understand the phenomena of HHG and quantify the light used for experiments. Furthermore, polarization control allows for …
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Extreme Ultraviolet Polarimetry with Laser-Generated High-Order Harmonics
We developed an extreme ultraviolet (EUV) polarimeter, which employs laser-generated high-order harmonics as the light source. This relatively high-flux directional EUV source has available wavelengths between 8 nm and 62 nm and easily rotatable linear polarization. The polarimeter will aid …
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Controlling Laser High-Order Harmonic Generation Using Weak Counter-Propagating Light
… measurements of optical surfaces in the extreme ultraviolet (EUV) wavelength range.
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Coexistence of Slow Magnetoacoustic Waves and Thermal Limit Cycles in a Coronal Bright Point
… ubiquitous on the solar surface observed in extreme ultraviolet (EUV) and X-ray wavelengths. We analyse characteristics of oscillations in EUV emissions observed by the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamics Observatory (SDO) that are potentially due to different …
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Extreme ultraviolet probing of laser ablation
This thesis details the use of extreme ultraviolet (EUV) sources in probing laser ablation and material opacity. The radiation hydrodynamic codes POLLUX and h2d are used to study the Rayleigh-Taylor instability in a regime relevant to inertial fusion energy and, in support of experimental effort, …
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Fast Large-Scale Electromagnetic Simulation of Doubly Periodic Structures in Layered Media
… in layered media, which can be commonly found in extreme ultraviolet (EUV) lithography, metasurfaces, and frequency selective surfaces. Such problems can be solved by rigorous numerical methods like finite-difference time-domain (FDTD) method and finite element method (FEM). However, FDTD and FEM …
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Scandium Oxide Thin Films and Their Optical Properties in the Extreme Ultraviolet
… scandium oxide thin film was measured in the Extreme Ultraviolet (EUV) from 2.7 to 50 nm (459.3 to 24.8 eV) using synchrotron radiation at the Advanced Light Source Beamline 6.3.2 at the Lawrence Berkeley National Laboratory. In these measurements, a new method for data collection was used, in …
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Fabrication of critical-angle transmission gratings for high efficiency x-ray spectroscopy
… As high-energy electromagnetic waves, such as extreme ultraviolet (EUV) and x rays, are of interest in various science fields including astrophysics, fine pitch gratings with high diffraction efficiency are required. The critical angle transmission (CAT) grating has been devised to enhance …
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Theoretical and Experimental Studies of Radiation from Z-Pinch Complex Wire Arrays and Applications
… different plasmas radiate. Radiation from the extreme ultraviolet (EUV) range has also been of recent interest due the substantial contribution into total radiation yields. Therefore EUV radiation of M-shell Cu was modeled and benchmarked with spheromak and laser-produced plasma data. Lastly, …
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Time-resolved spectroscopic investigation of N2/H2 nanosecond pulsed discharges and EUV-induced low-temperature plasmas
Extreme ultraviolet (EUV) lithography is central to advanced semiconductor manufacturing, yet the low-density plasmas triggered by EUV photons in scanner-relevant environments remain only partially characterised. Their transient, photon-driven nature complicates invasive diagnostics and makes …
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Tabletop coherent extreme ultraviolet and soft X-ray sources based on high harmonic generation
… tenth, even thousandth, order harmonics at the extreme ultraviolet (EUV) and soft X-ray range. Such an unprecedented broadband and coherent spectrum thus has many novel applications, one of which is to build tabletop coherent EUV and soft X-ray sources. The development of EUV and soft X-ray …
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Progress in coherent lithography using table-top extreme ultraviolet lasers
… This dissertation describes alternative extreme ultraviolet (EUV) lithography techniques which combine table-top EUV laser and various cost-effective imaging strategies. For each technique, numerical simulations, system design, experiment result and its analysis will be presented. In …
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Surface cleaning of optics by plasma (scope) with atomic hydrogen
A major obstacle in the implementation of extreme ultraviolet (EUV) light photolithography in production tools is the accumulation of fuel debris on the collector optics near the pinch region. Specifically, removal of deposited tin from the source onto the collector optics is needed to improve the …
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Comparison and Investigation of Solar Spectral Irradiance with Solar Aspect Monitor
… monitors taking measurements from the extreme ultraviolet (EUV) to the near infrared (NIR). A single-scattering Rayleigh model is developed to eliminate the scattered brightness below 90 km and an inversion technique is applied on limb-scanned radiance profiles at 236.5 nm, NO (0,1) …
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Detection of Solar Prominences using Automated Methods and Analysis of their Dynamic Pre-Eruptive Behaviour
… the oscillatory dynamics of prominences in the Extreme Ultraviolet (EUV), and how these may change in the build-up to their eruption. Two events are studied. Firstly, an eruptive filament is analysed using data from the Solar and Heliospheric Observatory (SoHO), revealing similar ultra-long …
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Electrostatically Levitated Object Handoff to Minimize Wear and Particle Generation
… sizes are reducing towards low nanometers using extreme ultraviolet (EUV) light, which requires exposure in vacuum. Even a few particles on surfaces in the optical path (such as reticles, lenses, and mirrors) pose critical limits on performance, yield, and machine availability. In the …
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COMPLETE TEMPORAL MEASUREMENT OF LOW-INTENSITY AND HIGH-FREQUENCY ULTRASHORT LASER PULSES
… (NIR) and intense ultrashort pulses in the ultraviolet (UV) and extreme ultraviolet (EUV). The former are projected to find great use in the field of optical telecommunications, while the latter are the result of the relatively recent development of bright, coherent light sources in this …
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Interactions of intense optical and extreme-ultraviolet lasers with atoms and solids
… describes the interaction of intense optical and extreme-ultraviolet laser pulses with atoms and solids. The work was divided into two main parts: The first part describes studies on laser-produced plasmas done at the National Centre for Plasma Science and Technology in Dublin City University …
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Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources
… to avoid this problem. The use of 13.5nm Extreme Ultraviolet (EUV) light for lithography presents a solution. Switching to this wavelength would enable many of the expensive advanced techniques to be abandoned. It would also allow for a smaller resolution without as much reduction in …
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