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Showing 1 to 1 of 1 for “"Excited argon"”.
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Characterization of Microwave Discharge Plasmas for Surface Processing
… (MW) discharge plasmas: a supersonic flowing argon MW discharge maintained in a cylindrical quartz cavity at frequency ƒ = 2.45 GHz and a pulse repetitive MW discharge in air at ƒ = 9.5 GHz. Low temperature MW discharges have been proven to posses attractive properties for plasma cleaning and …