Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 29 for “"Etching techniques"”.
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The Development of Microfluidic Devices Fabricated From Poly(dimethyl) Siloxane
… involved lithographic and ""soft"" lithographic techniques. Capillary electrophoretic separation ""chips"" as well as a series of patterns for surface functionalization were demonstrated in PDMS. PDMS proved to be a unique medium for high pH separations allowing the electrophoretic separation of …
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High fidelity pattern transfer in InP photonic device fabrication
… using standard, high throughput lithographic and etching techniques. The Faraday rotator is a 1.4 Jim InP-InGaAsP-InP waveguide with a line width tolerance of ± 0.07 pm.
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Printed microscale mono-crystalline silicon on flexible substrates for photovoltaic, strain sensors, and neural interface applications
… non-structured elastomeric stamps or bulk wafer etching techniques. Furthermore, this dissertation demonstrates a strategy in which modules consist of large-scale arrays of interconnected high-performance ultra-thin Si electronics that are mechanically flexible, stretchable, and semitransparent, …
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Dendritic Materials as a Dry Release Sacrificial Layer
… process to demonstrate a dry sacrificial etching technique. An array of cantilever beams 100 mum in width by 1000 mum in length was successfully released in 10 min. In addition, an array of microchannels was fabricated to better understand the limitations of HB560 decomposition. A full …
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Manufacturing methods for high density micro-channel arrays
… may be viewed as complementary to current plasma etching techniques and lithography. Several testing platforms were devised for the creation of the plastic well arrays based on the high speed ram principle. A modified Charmilles Roboform 30 machine was used to create the silicon arrays. While …
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Harnessing Solid-State Ionic Transport for Nanomanufacturing and Nanodevices
… a rate that is comparable to conventional dry-etching techniques. A numerical model has also been developed to understand the mixed electronic-ionic transport characteristics as well as the metal-solid electrolyte interface kinetics. This model can also benefit the study and design of batteries …
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Additive Lithography Fabrication And Integration Of Micro Optics
… easily fabricated using grinding and polishing techniques, but few methods exist for inexpensive fabrication of micro optical elements. In this work we present an innovative technique termed Additive Lithography that makes use of binary masks and controlled partial exposures to sculpt …
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Antimony-based type-II superlattice infrared detectors
… was used combined with chemical wet or dry etching techniques in order to fabricate antinomy-based type-II superlattice infrared detectors. Subsequently, Fourier transform infrared spectroscopy and radiometric techniques were applied for optical characterization in order to obtain a …
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Silicon field emission pressure sensor
… design, are presented. Various wet and dry etching techniques of forming emitter arrays are compared. A combined wet/dry fabrication process is developed to achieve array uniformity and reproducibility. The characteristics of pressure sensor with ideal field emission array are simulated, …
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Imperceptible Realities: An exhibition – and – Digitalisation: Re-imaging the real beyond notions of the original and the copy in contemporary printmaking: An exegesis
… for the continuing relevance of traditional etching techniques through a pivotal case study that scrutinised Rembrandt van Rijn’s etching The Shell (Conus marmoreus). In contrasting traditional etching techniques with newer methods of digital printmaking a significant copy, derived from a …
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Metal-assisted chemical etching of β-gallium oxide
… surface due to high-energy ions, while most wet etching techniques can only produce very limited aspect ratios. In this thesis, β-Ga2O3 fin arrays by inverse metal-assisted chemical etching (MacEtch), under UV light irradiation, with a high aspect ratio and excellent surface quality, are …
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Topological Insulators Interfaced with Trivial and Ferromagnetic Insulators. Selective contact and patterning of surface states.
… of topological surface states. First, different etching techniques are compared on TI films and the devices are characterised by transport measurements. Next, two types of heterostructures are investigated which allow for control and patterning of the TSS. First, the TI is interfaced with trivial …
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Rapid fabrication of deep-submicron Josephson junctions
… to deposit the contact layer. Several new plasma etching techniques were developed to selectively etch the various materials present in the process as well. The full process flow is briefly described in order of fabrication, followed by a detailed discussion of major process steps, issues, and …
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Growth, fabrication, and measurement of superconducting barium(1-x) potassium bismuth oxygen(3) thin films and devices
… and devices is described, including dry etching techniques (ion milling and RIBM) as well as annealing and processing effects. Transport measurements yield $\rm T\sb{c0}$ = 25-29$\sp\circ\rm K,$ $\rm J\sb{c}$ $\ge$ 1 $\rm MA/cm\sp2$ $(4\sp\circ\rm K),$ and $\rm R\sb{s}$ $\approx$ 1 $\rm …
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A constitutional study of a dual phase steel containing 12% chromium
… by optical microscopy using two different etching techniques while the volume fractions of the various constituents were determined by a point counting method. Transmission electron microscopy was used to study the carbide morphologies and the nucleation and growth modes of the phases …
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Biohybrid Peripheral Neural Interfaces: Combining Cell Transplantation and Flexible Electronics for Functional Neurological Restoration
… fabricated using photolithography and chemical etching techniques to establish a functional electronic device. This multielectrode neural device contains 32 electrodes. Each electrode consisting of planar gold, coated with a conducting polymer (PEDOT:PSS) to decrease the electrode impedance and …
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Monolithic integration of 1.55 micron photodetectors with GaAs electronics for high speed optical communications
… device performance. While the conventional dry etching techniques are impractical to pattern the desired deep pillars, electron cyclotron resonance (ECR) enhanced reactive ion etching (RIE) of InP using chlorine/helium chemistry has been developed, resulting in fast, deep, smooth, and highly …
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Micro- and nano-electrode arrays for electroanalytical sensing
… by standard photolithographic and reactive-ion etching techniques, is presented. The first set of microelectrode arrays had a constant relative centre-centre spacing of 10r (where r is the electrode radius). As a value of r was decreased, the cyclic voltammograms recorded from the array became …
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Development and characterisation of macro-disc and micro-band electrodes for electrochemical sensing applications
… microfabrication methods i.e. lithography and etching techniques. Glucose oxidase was selected as a model enzyme to attach onto a platinum modified gold microband electrode by electropolymerisation with an o-phenylenediamine/ß-cyclodextrin layer. The resulting microband biosensor demonstrated …
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