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Showing 1 to 1 of 1 for “"Endotaxy"”.
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Laser Metallization And Doping For Silicon Carbide Diode Fabrication And Endotaxy
… microscopic images indicate that the laser endotaxy process maintains the crystalline integrity of the substrate without any amorphization. Rutherford backscattering studies also show no amorphization and evident lattice disorder occur during this laser solid phase diffusion process. The …