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Showing 1 to 15 of 15 for “"Ellipsometer"”.
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Design of an in-situ ellipsometer
… quality film and layer structure. An in-situ ellipsometer can be mounted on a deposition chamber and, through view ports, make a measurement of the complex reflection coefficient of the sample inside during the deposition process. Through an appropriate mathematical model, the thickness of the …
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The construction of an ellipsometer to measure the refractive index and thickness of thin films.
The ellipsometer, like all precision optical instruments, is a delicate piece of equipment requiring care in its construction, maintenance and operation. Since multiple reflections and birefringence in the optical components introduce large instrumental errors, a correct choice of component parts …
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Opto-mechanical design of synchrotron radiation-based far-infrared spectroscopic ellipsometer with strong magnetic-field
… radiation based far-infrared spectroscopic ellipsometer with a strong external magnetic-field capability. Since high magnetic field has enabled major breakthrough in science such instrument will be highly important to the field of condensed matter physics and characterization of advanced …
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The colour of AuAgCu alloys
… system have been examined with a nulling spectro-ellipsometer. The use of an ellipsometer to derive the colour co-ordinates of a sample is a novel technique. The ellipsometer has the advantages for use as a physical colorimeter in that its calibration is gonio-metric and it does not require a …
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Optical dielectric properties of YBa2Cu3O6+x and Ba1-xKxBiO
… etc.). We have constructed a rotating analyzer ellipsometer (RAE) and modified it to allow measurement of samples significantly smaller than the extent of the incident beam (sample dimensions of about O.lmm are possible). In this work, normal state (room temperature) dielectric properties of two …
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Entwicklung und Charakterisierung von La/B4C-Multischichtsystemen als Röntgenspiegel im Energiebereich 100 - 200 eV
… wurde zusätzlich ein In-situ Ellipsometer in Betrieb genommen. Des Weiteren soll eine Senkung der Grenzflächenrauigkeiten und damit einhergehende Erhöhung der Reflektivitäten von La/B4C-Multischichten durch das Polieren mit beschleunigten Ionen der einzelnen Schichten während …
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The optical properties of oxide films on copper and copper alloys
… nm were made using an automatic, self-nulling ellipsometer. From this data the optical constants and thickness of the oxide films were computed and compared to those of the bulk oxide. The optical constants of the oxide were found to depend on the thickness of the film and the identity of the …
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Entwicklung eines elektrooptischen Ellipsometers und dessen Erprobung im Bereich der Glaukomfrüherkennung
… zu deren Dicke zeigt. Mit dem elektrooptischen Ellipsometer lassen sich in einer Polarisationseinheit aus dem Licht einer 785 nm Laserdiode verschiedene Polarisationszustände erzeugen und in das zu untersuchende Auge einkoppeln. Das hinter der Nervenfaserschicht reflektierte Licht wird in einer …
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Hochpräzise drei-dimensionale Bestimmung optischer und biomechanischer Eigenschaften der menschlichen Hornhaut
… Einsatz, ein sehr kompaktes elektrooptischen Ellipsometer entwickelt und aufgebaut. Erste Punktmessungen an einem optisch doppelbrechenden Probekörper demonstrieren die Möglichkeiten der elektrooptischen Ellipsometrie.
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System Design, Noise Reduction, and Improved Dimension Reconstruction for High Performance Ellipsometry
… principles of ellipsometry are as follows. An ellipsometer experimentally measures the samples’ changing effects on a light beam’s polarization state, quantified by ellipsometric parameters or a Mueller matrix. The experimental results are then fitted to an optical model to extract the sample’s …
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Developing spectroscopic ellipsometry to study II-VI and diluted magnetic semiconductors
… constructed a rotating analyzer spectroscopic ellipsometer (RAE) to study effects of magnetic and nonmagnetic doping on the £1 and £1 + .11 band gap energies in ZnSe-based II-VI semiconductors. To remove the natural surface oxide overlayer which distorts the intrinsic dielectric response of the …
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Optical modeling off-stoichiometric amorphous Al2O3 thin films deposited by reactive sputtering
… When a film becomes optically thick, the ellipsometer cannot see inside the film. Even so, a modeling based on the ellipsometric data works well as long as the film’s properties are homogeneous along its depth. But, when there is inhomogeneity in the optically thick film, the …
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HF vapor etching and cleaning of silicon wafer surfaces
… The etching rates were measured by an in situ ellipsometer installed on the HF vapor reactor. Ellipsometric measurements suggest that oxide etching can occur without a condensed layer or with a condensed layer on the oxide surface. The etching rates of oxide in the condensed regime were very …
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Feasibility of Ellipsometric Sensor Development for Use During PECVD SiOx Coated Polymer Product Manufacturing
… the construction of a null (conventional) ellipsometer for further research. The curved surface of the beverage containers under study unnecessarily complicated the feasibility study so further research examined PECVD SiOX on biaxially oriented PET instead. Characterization of the PECVD …
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Formulation of Hyaluronidase Enzyme Sensitive Topical Nanomicrobicides for HIV Virus Transmission Prevention
… and ¹H-NMR analyses. Mucin interaction and ellipsometer measurements confirmed that mucoadhesion of HA-SH-NFs was increased compared to that of native HA polymer based on an increase in the size (~4 fold), thickness (~3 fold) and adsorbed mucin amount (~2 fold) after 3 h incubation of …