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Showing 1 to 1 of 1 for “"Elektrische Gasenentladung"”.
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Abscheidung und Charakterisierung von PECVD-Aluminiumoxidschichten
Nowadays, thin films are used widely to increase the life-time of the tooling surfaces. Alumina coatings are known to exhibit advantageous mechanical properties as well as chemical inertness and oxidation resistance at high temperatures. Hence, this material is a suitable candidate for coatings …