Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 2 of 2 for “"Electrostatic microactuator"”.
-
A low-leakage 3-way silicon microvalve
This thesis presents an electrostatically actuated silicon microvalve designed for use in a miniature gas chromatography system for sample preparation and injection. In contrast to prior art, this design combines an integrated low voltage electrostatic microactuator as well as tight sealing …
-
Fault detection and diagnosis : application in microelectromechanical systems
… modes of two microelectromechanical systems; an electrostatic parallel-plate microactuator and a torsionally resonant atomic force microscope. From an engineering point of view, failure modes appeared in the microcomponents of the microactuator and the TR-AFM are encountered as parameter …