Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 3 of 3 for “"Electrostatic Resonators"”.
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High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators with Piezoresistive Readout
… on developing high frequency micromechanical resonators. As the two most common and conventional MEMS resonators, piezoelectric and electrostatic resonators have been at the center of attention despite having some drawbacks. Piezoelectric resonators provide low impedances that make them …
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Active sensing in silicon-based MEMS resonators
Microelectromechanical resonators are advantageous over traditional LC tanks and o-chip quartz crystals due to their high quality factors, small size and low power consumption. FET-sensing has been demonstrated in resonant body transistors (RBTs) to reach an order of magnitude higher frequencies …
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Investigation of the Mechanical Behavior of Microbeam-Based MEMS Devices
… stretching, an applied axial load, a DC electrostatic force, and, for the case of resonant sensors, an AC harmonic force. Further, a novel method that uses a reduced-order model is introduced for simulating the behavior of microbeams under a DC electrostatic force. The presented method …