Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 20 for “"Electrostatic Actuation"”.
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Micro Electrostatic Actuation of a Silicon Diaphragm
… system) devices can be actuated by electrostatic forces, which utilize an induced electric field to pull two charged plates towards one another. Such devices were fabricated and electrostatic actuation of the diaphragms was performed to analyze its viability as a micro-speaker. The …
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Effect of Space Charges on Micro- to Nanoscale Electrostatic Actuation
… becomes important on micro- to nanoscale electrostatic actuations because the appropriate phenomenological electrostatic length scale is on the order of the physical scale of the system. A 1-D electromechanical model has been developed to provide quantitative analysis of the effect of the …
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Analysis of hybrid electrothermomechanical microactuators with integrated electrothermal and electrostatic actuation
… this research is to integrate electrothermal and electrostatic actuation in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical microactuators have more advantages than pure …
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Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
… to provide measurable signals with low noise. Electrostatic actuation and sensing are both performed using only one pair of electrodes. The motion of the cantilever changes the capacitance of the actuation electrodes at a frequency three times that of the actuation signal. This method allows …
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Electrostatic Micro Gas Pumping for Micro Gas Chromatography Systems---Fabrication and Experiments
… open and close as the diaphragm actuates. As an actuation compresses gas, the outlet valve should open with the inlet valve closed so that the gas flows out. As the diaphragm releases, the outlet valve closes and the inlet valve open, and the gas flows into the chamber. The volume of the pump …
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A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry
… a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to …
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Electrostatic zipping actuators and their applications to MEMS
Electrostatic actuation is the most common and well-developed method of generating motion on the micro scale. To overcome the challenge of providing both high force and large displacement, electrostatic zipping actuators have been developed and applied to various devices. As device thicknesses …
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Designing and Fabricating MEMS Cantilever Switches
In this thesis, MEMS switches actuated using electrostatic actuation is explored. MEMS switches that are lateral switches and clamped-clamped switches are designed, fabricated, and tested in this thesis. This thesis extensively explains the process by which the MEMS Switches were designed and …
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Analysis, design, fabrication, and testing of a MEMS switch for power applications
This thesis reports an electrostatic MEMS switch for power applications. The proposed switching system consists of an array of single-switch cells, and a parallel transistor-based protection circuit for arcless switching. Such a system design enables the switch development to focus on a …
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Development of Electrodes for an Electrostatically Actuated Mesh Reflector
… precision. A candidate approach for distributed actuation in large space structures is macroscale electrostatic actuation, which offers advantages in low power, high bandwidth, and low parasitic mass. Electrostatic actuation is commonly used in small-scale devices such as nano- and …
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Novel probe structures for high-speed atomic force microscopy
… (i.e. piezoelectric) are limited in regards to actuation speed and resonance frequency presenting the user with an undesired trade-off of speed versus resolution. Based on a pre-existing technology known as the FIRAT (Force Sensing Integrated Readout and Active Tip) AFM probe, this work aims to …
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Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
This thesis describes electrostatic actuation techniques and mechanical design features for realizing large planar analog vertical travel in an electrostatically actuated diffractive mid-infrared optical device, which is robust, both to manufacture, and against pull-in during use. This device, …
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Nanomechanical and nanoelectromechanical phenomena in 2D-atomic crystals : a scanning probe microscopy approach
… force microscopy (UFM), direct-contact electrostatic force microscopy (DC-EFM) and heterodyne force microscopy (HFM). With the use of these techniques we report the observation of the nanoscale Moir`e pattern when graphene is aligned on h-BN and we propose that the imaging with atomic …
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Computational Design of the Electrical and Mechanical Performance of Steerable MEMS Antennas
… in space was designed to be changed through electrostatic actuation of the antenna platform's hinges.</p> <p>The goal of this thesis was to improve on the initial design and performance of the prototypic antenna. The best variation of the prototype antenna could rotate ±4.0° in two degrees of …
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A MEMS valve for the MIT Microengine
… comprises of three fusion-bonded SOI wafers. Electrostatic- actuation is used to lift the silicon boss actuator supported on four L-shaped tethers and open against high pressure. Polysilicon is chosen as the seat material for high-temperature operating environment. The flow path of the valve …
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Development of a spring-less RF MEMS switch
… over a RF transmitting coplanar waveguide. Electrostatic actuation is used during the switching operation. The attractive force from the electrostatic field is generated by a pair of the actuation electrodes on both sides of the armature, depending on the direction of the …
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Quasistatisch auslenkbarer Kippspiegel zur Ablenkung von Licht
… With these actuator's a new concept of electrostatic actuation has been realised. While the drive electrodes are integrated into the deflectable mirror, the whole counter electrode below the mirror plate remains at equal ground potential. The device is manufactured out of two parts using …
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MEMS Hybrid Electronic Integration: From Micro-Robotic Actuation to Control and Monitoring of MEMS Sensor
… (FP) MicroStressBots. These micro-robots rely on electrostatic actuation and utilize Untethered Scratch Drive Actuation (USDA) for translational motion. Individual selectivity and rotational control are achieved through an electrostatically actuated steering arm, which is programmed via …
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Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields
… in multi-physics fields. These include electric actuation (AC and DC), squeeze-film damping, thermoelastic damping, and structural forces. The second objective is to investigate MEMS phenomena, such as squeeze-film damping and dynamic pull-in, and use the latter to design a novel RF-MEMS switch. …
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Applications of Non-linearities in RF MEMS Switches and Resonators
… for timing applications. MEMS devices that are electrostatically actuated exhibit significant non-linearities. The origins of the non-linearities are both electrical (electrostatic actuation) and mechanical (dimensions and material properties). The influence of spring non-linearities (cubic and …