Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 17 of 17 for “"Electron beam evaporation"”.
-
Fabrication and applications of pillar bowtie nanoantenna arrays
… tools to fabricate our nanostructure, namely, electron lithographic tools, evaporator and plasma chambers. The theory of operation of the machines, especially electron beam lithography for higher resolution, electron beam evaporation for thin film deposition, reactive ion etching (RIE) for high …
-
Characterization of Boron Nitride Thin Films on Silicon (100) Wafer.
… Boron nitride films were deposited using electron beam evaporation without bias voltage and nitrogen bombardment (to reduce stresses) were characterize using FTIR, XRD, SEM, EDS, TEM, and AFM techniques. In addition, a pin-on-disk tribological test was used to measure coefficient of …
-
Electron-beam evaporated polycrystalline silicon thin-film solar cells: paths to better performance
… thin-film solar cells on glass prepared by electron-beam evaporation and solid-phase crystallisation – an emerging technology with a potential to meet the requirements. It combines the advantages of the mature crystalline silicon technology with low material usage and large- area monolithic …
-
Design, Herstellung und Lebensdauer gradierter elektronenstrahlgedampfter Wärmedämmschichten im System Aluminiumoxid, Zirkonoxid
… was a key factor for the processing by jumping electron beam evaporation. Microstructure and thermal stabilities have been analyzed in order to optimize the complex processing route. Parallel numeric calculations on stress states and influence factors on conventional system have been carried out …
-
Instrumentation For the Study of Tantalum Diffusion Barriers Between Silicon Substrates and Copper Films
… films will be grown in an ultra high vacuum by electron beam evaporation. And the characterization of the films will be accomplished by spectrographic and electrical resistivity means.
-
Reactive radio frequency sputtering of iron oxide thin films for electrical resistivity characterization
… to avoid the problems of sputtering oxides by Electron Beam evaporation or Direct Current sputtering, the recently developed technique of Radio Frequency sputtering was employed. Thus, the iron oxide thin films were produced by reactive Radio Frequency sputtering. The correlation between the …
-
Design and fabrication of a recycled carrier modulator
… 360 nm and smallest feature size of ~180 nm), electron beam lithography was clearly the most viable option for a high precision and repeatable process. Material growth was done using plasma enhance chemical vapor deposition (PECVD), and thermal (resistive and electron beam) evaporation. Pattern …
-
An investigation into phenomena which influence the optimisation of ion plating systems
… work has concentrated primarily on electron beam evaporation in thermionically enhanced discharges. Investigations have centred on various aspects of discharges used in ion plating and the influence of gas scattering mechanisms on the vapour species during deposition. This has been …
-
The application of GHz bandwidth electrical pulses to a single semiconductor quantum dot.
… a specific voltage regime. Photolithography and electron-beam evaporation were used to manufacture several micron-scale opto-electronic devices. Several changes were made with the intention of reducing the resistance and capacitance of the device, with respect to the original macroscopic design. …
-
Vertical silicon nanowire arrays for gas sensing
… reliable top electrical contacts by using tilted electron beam evaporation with a custom-built rotation plate. A suspended metal top contact layer was formed on vertically aligned silicon nanowires using this approach. We have also systematically investigated the contact behavior between silicon …
-
Terahertz metamaterials for sensing and detection
… by photolithographic lift-off process using electron beam evaporation for the deposition of metal layers. The terahertz time domain spectroscopy measurement technique was used to characterize the devices in both transmission and reflection modes. Each device was composed of arrays of …
-
Novel Materials and Processes for Fabrication of Integrated Photonic and Opto-Electronic Devices
… chemical vapor deposition (CVD), sputtering, and electron beam evaporation. In this work, design, fabrication, and characterization is done with novel sol-gel and polymer materials utilizing new processes for the creation of optical waveguides, interconnects, and electro-optic modulators. Sol-gel, …
-
A study of amorphous hydrogenated titanium carbide films: Structure, stability, and role of hydrogen doping
… compound tetraneopentyl-titanium. X-ray and electron diffraction studies confirmed the amorphicity of the coatings, while controlled-heating experiments emphasized their stability against crystallization to higher temperatures (-1100°C) than typical glassy metals. Analyses of the coatings by …
-
Investigation of 'high-k' materials as alternative dielectrics for AlGaN/GaN-based metal-insulator-semiconductor heterostructure field effect transistors (MISHFET)
… - e.g. pulsed-laser deposition (PLD) and electron-beam evaporation (EBE) - were investigated and partly modified. Also, methods for the electrical characterization of the processed devices were optimized or established, in particular means to investigate currents through insulators were …
-
Investigation Of Parallel Planar Defects And Texture Transformation In Electron Beam Evaporated Silver Thin Films
… synthesized at varied deposition rates using electron beam evaporation. Film samples were annealed to induce texture transformation using two setups; the first setup was used to analyze texture transformation of samples with different thicknesses deposited at different rates and the second …
-
Single molecule optical absorption at room temperature detected by scanning tunneling microscopy
… nm thick platinum gold hybrid films deposited by electron beam evaporation onto c-plane sapphire substrates serve as substrates. Low resistance, sufficient light transmission and atomically flat island surfaces make these strong candidates for optical experiments. As expected, SMA-STM performed on …
-
A controlled release microchip
… and a potentiostat. Future integration of microelectronic components may allow reservoirs to be opened on demand by a preprogrammed microprocessor, remote control, or by biosensors and biofeedback controllers. Potential advantages of the microchip for the release of drugs and other chemicals may …