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Showing 1 to 1 of 1 for “"Electron Energy Transport"”.
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Radiation Transport in Low Pressure Plasmas: Lighting and Semiconductor Etching Plasmas
… plasmas. In some products like lamps, the transport of radiation is an important design consideration. In other instances, such as semiconductor materials processing, the role of UV photons in surface processes is a side product and is poorly understood. Since the basic surface reaction …