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Showing 1 to 1 of 1 for “"Electromagnetics Module"”.
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Radiation Transport in Low Pressure Plasmas: Lighting and Semiconductor Etching Plasmas
Ultra-violet (UV) radiation is emitted by many molecular and atomic species in technological plasmas. In some products like lamps, the transport of radiation is an important design consideration. In other instances, such as semiconductor materials processing, the role of UV photons in surface …