Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 155 for “"Electro-Mechanical Systems"”.
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Nano-electro-mechanical systems fabricated by tip-based nanofabrication
… we demonstrated various types of silicon NEMS mechanical resonators such as single-clamped, double-clamped, wavy-shaped, spider-like and spiral-shaped using this TBN method with a heated AFM tip. Laser interferometer measurement on two NEMS resonators showed resonance frequencies of 1.2MHz and …
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Microactuators and their application in micro-opto-electro-mechanical systems (MOEMS)
Microactuators are active elements for microelectromechanical systems (MEMS), and are used to provide force to move the MEMS device in the way required. Therefore, their force characteristics, displacement capabilities and velocity ranges are of importance, and require to be investigated. Scratch …
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Theory for hydrostatic gas journal bearings for micro-electro-mechanical systems
… to develop high-speed rotating Power MEMS (Micro-Electro-Mechanical Systems) using computer chip fabrication technologies. To produce high power (10-50 W) in a small volume (less than one cubic centimeter), the micro-turbo-machinery must be spun at a rotational speed on the order of million rpm. …
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Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems
… Institute of Technology, Dept. of Mechanical Engineering, 1995.
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Implementation of a Low Cost Micro Electro Mechanical Systems Inertial Navigation Solution
<p>The purpose of this study is to develop a low cost navigation solution for General Aviation (GA) aircraft and flight testing aircraft. This low cost solution uses a Global Positioning System (GPS) coupled with an Inertial Navigation Solution (INS) to provide a more accurate, stable navigation …
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Mode I and Mode II Measurements For Stiction Failed Micro-Electro-Mechanical Systems
Among MicroElectroMechanical Systems (MEMS), the most common type of failure is stiction. Stiction is the unintended adhesion between two surfaces when they are in close proximity to each other. Various studies have been conducted in recent years to study stiction. Our research group has shown the …
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FastStokes : a fast 3-D fluid simulation program for micro-electro-mechanical systems
… forces on geometrically complicated MEMS (micro- electro- mechanical systems) devices. Unlike the 3-D finite element or finite difference solvers which often take days to run to completion or fail when geometry gets complicated, the FastStokes 3.0 simulation program is capable of simulating …
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Design, Fabrication, and Characterization of a Thin-Film Nickel-Titanium Shape Memory Alloy Diaphragm for Use in Micro-Electro-Mechanical Systems
<p>Previous work done at Cal Poly has shown that thin-film nickel-titanium (NiTi) can be easily sputtered onto silicon wafers and annealed to create a crystallized shape memory alloy (SMA) film. Initial work on creating devices yielded cantilevers that were highly warped due to thin-film stress …
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Improving operational effectiveness in the job-shop environment through discrete event simulation and innovative process design
… area dedicated to production of precision electro-mechanical systems, of which they are contracted to service during the complete lifecycle. Currently, the production system is dedicated to the refurbishment of these electro-mechanical systems; it could be characterized as a high-mix low …
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Evaluation on the thin-film phase change material-based technologies
… materials are considered, non-volatile electronic memories and MEMS (Micro-Electro-Mechanical Systems) actuators. The markets for those two applications are fast growing and rapidly changing, so new materials technologies with superior performance are of great interest. Devices made with …
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Comparative design, modeling, and control analysis of robotic transmissions
… of impedance- and torque controlled rotary electro-mechanical systems. The experimental analysis focuses on planetary, cycloidal, harmonic and cable reducers, but excludes direct-drive, pneumatic, hydraulic and friction drives. Neither sensors nor actuators with better resolution nor …
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Predicting the Effects of Dimensional and Material Property Variations in Micro Compliant Mechanisms
<p>Surface micromachining of micro-electro-mechanical systems (MEMS), like all other fabrication processes, has inherent variation that leads to uncertain material and dimensional parameters. To obtain accurate and reliable predictions of mechanism behavior, the effects of these variations need to …
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Reliability analysis of smart electrical transmission system and reliability modeling through dynamic flowgraph methodology
… allow the evaluation of the reliability of systems and provide important information on how to improve a system‟s life to reduce risk and hazards. With the advancement in technology, the existing methods were extended and new methods were adopted. The advancement from mechanical to numerical …
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Study of the electromechanic aspects of RF MEM devices with particular emphasis on the dynamic behavior for the case of RF MEM switches and tuneable capacitors
Research on MEMS (Micro Electro Mechanical systems) has seen an amazing growth during the last 15 years, stimulated both by their interesting physical properties and their attractive application potential. One of those appealing MEMS applications are Radio Frequency (RF) switches. These devices …
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Emergency delivery of Vasopressin from an implantable MEMS rapid drug delivery device
… rapid drug delivery device based on micro-electro-mechanical systems (MEMS) technology was designed, fabricated and validated for the in vivo rapid delivery of vasopressin in a rabbit model. In vitro characterization of device performance found the device capable of reliably and …
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Sensor Package Analysis and Simulation for Direct Sensor-to-Satellite Links
… 4-bit phase shifters, which can be made in micro-electro-mechanical systems (MEMS) or in monolithic microwave integrated circuits (MMIC). The antennas are designed using array simulation program called 'ARRAY' and the results are used in another simulation program called Advanced Design System …
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Fabrication and Characterization of Small Scale Photo-Electro-Chemical Solar Cells
… and characterization of a small scale photoelectro-chemical (PEC) solar cell.</p> <p>The cell consists of a p-type silicon cathode with an etched micro-cavity that houses the zinc chloride electrolyte solution, and the cavity is covered by a sheet of zinc acting as the anode. The cell …
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Cross-Linked PDMS Expansion Due to Submersion in Liquid and Supercritical CO2
… this problem at the UA Engineered Micro/Nano Systems Laboratory (EMNSL), with swell-based protocols being identified as the most promising solution. In terms of compatibility to Micro-electro-mechanical Systems (MEMS) fabrication, CO2 is often used in the release of stiction for sensitive …
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A thermally efficient micro-reactor for thermophotovoltaic power generation
… and total energy delivered to portable consumer electronics such as laptops, and to military equipment that most soldiers carry with them today, open up opportunities for the miniaturization of different energy conversion technologies. A thermally efficient MEMS (micro electro mechanical systems) …
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