Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 1 of 1 for “"EUV-Strahlung"”.
-
Auslegung und Charakterisierung eines Extrem-Ultraviolett-Transmissionsmikroskops
… the utilization of extreme ultraviolet (EUV) radiation is currently taken into consideration world-wide. Because of the short wavelengths and the high element specific absorption of EUV-radiation microscopic analyses of physical structures in the order of less than 10 nm and thicknesses …