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Showing 1 to 1 of 1 for “"EUV-Mikroskop"”.
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Auslegung und Charakterisierung eines Extrem-Ultraviolett-Transmissionsmikroskops
… the utilization of extreme ultraviolet (EUV) radiation is currently taken into consideration world-wide. Because of the short wavelengths and the high element specific absorption of EUV-radiation microscopic analyses of physical structures in the order of less than 10 nm and thicknesses …