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Showing 1 to 2 of 2 for “"ECR-CVD"”.
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Estudio de la estabilidad térmica del a-SiNx:H producido mediante la técnica de plasma ECR-CVD
… por resonancia ciclotrónica de electrones (ECR-CVD) ha sido empleada para crecer láminas delgadas de nitruro de silicio hidrogenado (SiNx:H) de varias composiciones. Este dieléctrico de elevada permitividad tiene numerosas aplicaciones en microelectrónica, y reúne algunas características …
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Process-Induced Degradation during the Integration of Pb(Zr/x Ti/1-x)O3 Ferroelectric Capacitors
… damage, an electron cyclotron resonance (ECR) oxygen plasma treatment of the Pt/PZT/Pt capacitor was attempted. It was found that oxygen plasma treatment modifies the surface of Pt electrodes. Surface modification alleviates catalytic activity of Pt electrodes, thereby significantly …