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Showing 1 to 1 of 1 for “"Disk-type resonator"”.
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Chemical Application of Silicon-Based Resonant Microsensor
… the sensor resolution. In this work, a novel disk-type resonator developed at Georgia Tech was investigated as chemical microsensor for liquid-phase applications. The micromachined resonator vibrates in a rotational in-plane mode shape, reducing damping in a liquid environment. As part of the …