Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 23 for “"Dielectric films"”.
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Microstructural evolution of epitaxial dielectric films derived from chemical precursors
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
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Surface reaction mechanisms during the atomic layer deposition of silicon-based dielectrics
… (>95%) atomic layer deposition (ALD) of Si-based dielectric films for applications such as sidewall spacers in multiple patterning. In this work, we have primarily focused on understanding the surface reaction mechanisms during the ALD of Si-based dielectric films using in situ attenuated total …
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Sinter-patterning of oxide dielectric and high critical transition temperature films by pulsed neodymium:YAG laser
… based on metal carboxylates, various oxide dielectric films (ZrO$\sb2$, Y$\sb2$O$\sb3$ yttria stabilized zirconium (YSZ)), perovskite based oxide films (BaTiO$\sb3$, SrTiO$\sb3$, CaTiO$\sb3$, YBa$\sb2$Cu$\sb3$O$\sb{\rm 7-x}$), and Bi$\sb4$Ti$\sb3$O$\sb{12}$ film were fabricated by spin …
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Nanoscale thermal transport through solid-solid and solid-liquid interfaces
… on investigating heat transport through thin films and solid-solid interfaces. The samples in this study are thin lead zirconate- titanate (PZT) piezoelectric films used in sensing applications and dielectric films such as SiOC:H used in semiconductor industry. My results on the PZT films …
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Active Interfaces: From Biointerfaces to Mineralization
… Finally, we design nanometric, high performance dielectric films to reduce the required cleans of algae photobioreactor walls by 3x, which would increase the efficiency of the conversion of captured CO₂ to value products using algae. By applying low voltage (~1V) and power (~1nW), the …
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Depth Profiling in Thin Films via Waveguide Spectroscopy
… to depth profile thin optically transparent films which can be fabricated in the form of an asymmetric slab optical waveguide. Various methods for depth profiling thin dielectric films are also reviewed in a manner which illustrates the utility and limitations of depth profiling. The general …
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Dielectric materials by Atomic Layer Deposition for microelectronic applications
… mainly application in the deposition of the dielectric materials with high permittivity values, also known as high k dielectrics. These materials have been widely employed as insulator layer in the new generation of power devices, such as dynamic random access memories (DRAMs) and in …
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The construction of an ellipsometer to measure the refractive index and thickness of thin films.
… the thickness and refractive index of thin dielectric films. An attempt has been made to rationalise the mathematical approach and to present a valid method for the evaluation of results. The first Chapter is a general introduction to methods for measuring the thickness and/or refractive …
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Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods
… used for the deposition of thin, especially dielectric, films has been carried out between 2003 and 2008 at Chemnitz University of Technology. This thesis is a collection and summary of the original research during this period. In the main part of the thesis, work published in peer-reviewed …
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Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods
… used for the deposition of thin, especially dielectric, films has been carried out between 2003 and 2008 at Chemnitz University of Technology. This thesis is a collection and summary of the original research during this period. In the main part of the thesis, work published in peer-reviewed …
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Some electrical properties of thin films of polypropylene formed by vacuum evaporation
The electrical properties of films of metal-polypropylene-metal structures with polypropylene thicknesses in the range 600 - 2600Å were studied for possible use as thin dielectric films and some standard and reproducible results of electrical measurements were obtained. As a consequence of using …
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Development of novel alternative chemistry processes for dielectric etch applications
The removal of dielectric films in semiconductor processing relies almost exclusively on the use of perfluorocompounds (PFCs), which are suspected global warming agents. The two applications in semiconductor manufacture that account for the largest use and emissions of PFCs are the patterning of …
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INVESTIGATION OF THE STRUCTURAL PROPERTIES OF HAFNIUM ZIRCONIUM OXIDE THIN FILMS
Hafnium-zirconium oxide (HfxZr1-xO2)-based dielectrics have received an abundance of attention recently, holding promise for use in CMOS-compatible ferroelectric memory technology. Unlike in conventional ferroelectrics, ferroelectricity in HfxZr1-xO2 is retained in ultrathin films of only a few …
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Printing and coating of graphene and related materials for advanced devices
… suitable to achieve pin-hole free h-BN films down to 100nm thick and with dielectric constant of $\sim$7. I combined these h-BN dielectric films with graphene channels in inkjet printed flexible thin film transistors (TFTs), which showed mobility up to $\sim$100cm$^2$V$^{−1}$s$^{−1}$. I …
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Low dielectric constant fluorocarbon films containing silicon by plasma enhanced chemical vapor deposition
Use of low relative dielectric constant (low-k) material as an interlayer dielectric is among important approaches to reduce the RC time delay in high performance ultra-large-scale integrated circuits. Copper metallization is another approach besides the use of low-k material, in reducing the RC …
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Transparent Tissues and Porous Thin Films: A Brillouin Light Scattering Study
… of light, while strains within nano-scale films and coatings in the next generation of microelectronic devices could have profound effects on their functionality. Measurement of the elastic properties of such microscale structures has however proven difficult with traditional techniques …
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Study of PECVD Films Containing Flourine and Carbon and Diamond Like Carbon Films for Ultra Low Dielectric Constant Interlayer Dielectric Applications
… (BEOL) structures by decreasing the dielectric permittivity of the interlayer dielectric material in integrated circuits (ICs) lowers device delay times, power consumption and parasitic capacitance. a:C-F films that are thermally stable at 400C were deposited using tetrafluorocarbon …
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CONFINED LAYERED POLYMERIC SYSTEMS FOR PACKAGING ANDCAPACITOR APPLICATIONS
… and nanolayer coextrusion is used to produce films with thousands of layers containing two or more alternating polymers. This dissertation focuses on the structure-property relationships in layered polymeric systems for applications including confined crystallization for high gas barrier …
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Characterization and control of the nonlinear optical properties of dendritic silver nanoparticle clusters
… the properties of the energy transport in thin films of silver nanoparticles on dielectric surfaces are explored. Specifically, this dissertation will present experiments in which an ultrafast laser (~ 13 fs) centered at 800 nm is focused at normal incidence on a thin film of polydisperse silver …
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Synthesis and Characterization of Thermosetting Polyimide Oligomers for Microelectronics Packaging
… solution or melt processing the oligomers into films and gradually heating in a programmed temperature manner up to the appropriate reaction temperature for the phenylethynyl groups, which is approximately 350-400°C. Thermal analysis of the resulting films showed high glass transition …
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