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Showing 1 to 1 of 1 for “"Detachment lithography"”.
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Development of an electrostatic peristaltic gas micropump and nanochannel fabrication technique
… addition, a nanochannel fabrication method using detachment lithography is developed and discussed. Since a patterned adhesive is used as a spacer and a channel wall, this method can be applied to various material including Si, glass, and polymer. The low curing temperature (~140°C) enables …