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Showing 1 to 2 of 2 for “"Deposition Uniformity"”.
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Aerosol Filtration -- Agglomerate Particle Filtration and Particle Deposition Uniformity
… ambient environment, and non-uniform particle depositions are often met. The overall objective of this dissertation is to advance our current knowledge on these two specific areas of aerosol filtration: (1) agglomerate particle filtration and (2) particle deposition uniformity. For the first …
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Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering
… proven to be a promising ionized physical vapor deposition (PVD) technique, with industrial implementation hindered by low deposition rates. HiPIMS applies high voltages and high currents at low duty cycles to the sputtering target in order to achieve very high power densities, causing electron …