Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 3 of 3 for “"Defect inspection"”.
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Interferometric light microscopy for wafer defect inspection and three-dimensional object reconstruction
… topic of the dissertation is semiconductor wafer defect inspection. We developed a highly sensitive defect inspection system based on laser interferometric microcopy, called epi-illumination diffraction phase microscopy (epi-DPM), to measure both the phase and amplitude of the scattered field from …
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Unmanned Aerial Vehicle (UAV) navigation and image processing techniques for underground tunnel infrastructure assessment
… tunnel infrastructure networks require regular inspection and maintenance to ensure the safety and serviceability of lifeline transportation systems. Large-scale underground infrastructure comprises twin tunnel cross passages, shafts, caverns, and other complex geometries, which poses great …
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Diffraction phase microscopy for applications in materials science
… It has also been used in semiconductor wafer defect detection. Imaging systems using white light illumination can exhibit up to an order of magnitude lower noise than their laser counterparts. This is a result of the lower coherence, both spatially and temporally, which reduces noise …