Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 32 for “"Deep reactive ion etching"”.
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Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing
… rule of thumb for new semiconductor fabrication facilities (Fabs) is that revenues from the first year of production must match the capital cost of building the fab itself. With modem Fabs routinely exceeding $1 billion to build, this rule serves as a significant barrier to entry for groups …
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A feature-to-wafer-scale model of etch-rate non-uniformity in deep reactive ion etching/
Deep Reactive Ion Etching (DRIE) is an inherently complex dry etching process commonly used in the semiconductor manufacturing industry. This work presents a new modeling approach to capture global etch rate variation in DRIE by integrating wafer- and feature-scale nonuniformity models that are …
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A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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A Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomography
… (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these …
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Laser direct-write fabrication of MEMS
… systems (MEMS) have many applications in healthcare, consumer electronics, and automobile industry. Unfortunately, the development of novel MEMS is significantly hindered by the limitations of the state-of-the-art MEMS microfabrication processes such as high cost of equipment …
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Characterization and modeling of pattern dependencies and time evolution in plasma etching
… pattern dependent effects and time evolution of the etch rate in Deep Reactive Ion Etching (DRIE) is presented. DRIE is a key process for pattern formation in semiconductor fabrication. Non-uniformities are caused due to microloading and aspect ratio dependencies. The etch rate varies over …
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Contact-printed microelectromechanical systems
… flexible substrates, have many potential applications. Novel methods for additive fabrication of thin (125±15 nm thick) suspended gold membranes on a variety of rigid and flexible cavity-patterned substrates for MEMS applications are reported. The deflection of these membranes, suspended over …
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A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor
… and have seen an increase of applications in high-value communication systems as well as low-cost commercial communication networks. Significant advances have been made in the areas of MEMS switches. However, MEMS resonators that operate in GHz range, have high quality factor and are …
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Novel multiphase chemical reaction systems enabled by microfabrication technology
… been research in chemical process miniaturization -- reducing the characteristic length scale of the unit operation to improve heat and mass transfer, and ultimately process performance. My research has involved the design and fabrication of novel chemical reaction systems using MEMS and …
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MEMS micropump for a Micro Gas Analyzer
… and as such does not have self-contained actuation (the focus of future work). This research was carried out through a series of modeling, design, fabrication, and experimental testing tasks. Non-linear stress modeling tools characterizing the structural deformations of the micropump pistons and …
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Enhanced Fabrication of Microdroplet Generator Nozzle Arrays: Optimizing KOH Etching for Microfluidic Applications
… generators are useful devices with broad applications ranging from aerosolized drug delivery to three-dimensional (3D) printing-based additive manufacturing. One such technology comprises a microfabricated array of nozzles with droplet production driven by a piezoelectric transducer. The present …
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Combustion systems for power-MEMS applications
… micro-scale gas turbine engine for power generation and micro-propulsion applications, this thesis presents the design, fabrication, experimental testing, and modeling of the combustion system. Two fundamentally different combustion systems are presented; an advanced homogenous gas-phase …
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Hydraulic amplification for actuation in microelectromechanical systems
In this work the concept of hydraulic amplification as a means of stroke amplification is explored for applications in MicroElectroMechanical Systems (MEMS). Building on the batch fabrication technologies of the semiconductor industry, MEMS technology could enable the simultaneous fabrication of …
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On-Chip Isotropic Microchannels for Cooling Three Dimensional Microprocessors
This thesis reports the fabrication of three dimensionally independent on-chip microchannels using a CMOS-compatible single mask deep reactive ion etching (DRIE) process for cooling 3D ICs. Three dimensionally independent microchannels are fabricated by utilizing the RIE lag effect. This allows …
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Design of a high-speed, meso-scale nanopositioners driven by electromagnetic actuators
… thesis is to generate the design and fabrication knowledge that is required to engineer high-speed, six-axis, meso-scale nanopositioners that are driven by electromagnetic actuators. When compared to macro-scale nanopositioners, meso-scale nanopositioners enable a combination of greater …
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Design, fabrication, and characterization of a micro fuel processor
… This thesis focuses on developing microreaction technology that minimizes thermal losses during the conversion of fuels - such as light end hydrocarbons, their alcohols, and ammonia - to hydrogen. Critical issues in realizing high-efficiency devices capable of operating at high temperatures …
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A study of micromachined displacement pumps for vacuum generation
… rough pump integrated with micromachined ion-pumps. The rough pump generates a low vacuum of tens of torr from atmospheric pressure for the ion-pumps to initialize. Field ionization and electron impact ionization pumps that connect to the rough pumps continue to pump from the low vacuum of …
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Evaporation-induced non-wetting droplets on superhydrophilic surfaces
… a rough, lyophilic surface satisfying the imbibition condition, results in spontaneous spreading and hence complete wetting. However, in this thesis, we demonstrate that this wetting behavior can be altered by superheating the substrate such that droplets can reside in a non-wetting state due to …
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An evaluation of critical issues for microhydraulic transducers : silicon wafer bonding, strength of silicon on insulator membranes and gold-tin solder bonding
… currently being developed to produce bi-directional transducers with high power densities (500-1000 W/kg). The development of these devices, which combine microfabrication technology and piezoelectric materials, requires the use of variety of materials and fabrication technologies that are not …
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Development of a liquid-fueled micro-combustor
… thesis presents the modeling, design, fabrication, and experimental characterization of a microcombustor that catalytically burns JP8 fuel. Due to high energy densities stored in hydrocarbon fuels, microscale heat engines based on them are estimated to have specific energies about one order of …
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