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A Fundamental Study on the Relocation, Uptake, and Distribution of the Cs⁺ Primary Ion Beam During the Secondary Ion Mass Spectrometry Analysis

Giordani, Andrew J.Virginia Tech2016

Combining cesium (Cs) bombardment with positive secondary molecular ion detection (MCs+) can extend the analysis capability of Secondary Ion Mass Spectrometry (SIMS) from the dilute limit (<1%) to matrix elements. The MCs+ technique has had great success in quantifying the sample composition of …

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