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Showing 1 to 2 of 2 for “"Coatings -- Mechanical properties."”.

  1. Influence of design and coatings on the mechanical reliability of semiconductor wafers.

    We investigate some of the mechanical design factors of wafers and the effect on strength. Thin, solid, pre-stressed films are proposed as a means to improve the bulk mechanical properties of a wafer. Three-point bending was used to evaluate the laser scribe density and chemical processing effect …

    unt Repository record for Influence of design and coatings on the mechanical reliability of semiconductor wafers. (opens in a new tab)

  2. Adhesion, Residual Stresses and Tribology of Rf Sputter Deposited Titanium Carbide Coatings

    Mechanical properties of surface hard coatings depends strongly on both the adhesion of the coating to the substrate as well as the sign and magnitude of the residual stress in the coating. The residual stress in sputter deposited TiC films was found to be compressive and could be related to the …

    uiuc Repository record for Adhesion, Residual Stresses and Tribology of Rf Sputter Deposited Titanium Carbide Coatings (opens in a new tab)