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Showing 1 to 3 of 3 for “"Co-adsorbate"”.
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STUDY OF THE SELECTIVE GROWTH OF THIN FILMS: EFFECTS OF A THIRD SPECIES IN ATOMIC LAYER DEPOSITION
Electronic devices and their constituents have scaled down over generations for higher performance, lower power consumption, and continuation of Moore’s Law. As their nanostructures emerge in forms of 3D and more complex geometries, precise control is highly desirable when constructing integrated …
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METHODS OF AREA-SELECTIVE ATOMIC LAYER DEPOSITION OF A METAL OXIDE USING SMALL MOLECULE INHIBITORS AND COMPETITIVE ADSORPTION
The semiconductor industry faces growing manufacturing challenges as device dimensions shrink and nanopattern complexity increases. Bottom-up deposition processes are actively being pursued to overcome scaling and conformality limits of conventional top-down approaches and lower process costs. …
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Optische Dreiwellenspektroskopie an GaAs(001), Si(111) und Pt-Elektrolyt-Grenzflächen
Nonlinear optical spectroscopy was used to investigate GaAs(001), Si(111) and Pt-electrolyte interfaces. GaAs(001): The spectral dispersion of the magnitude of the second-order nonlinear susceptibility |æxyz| of GaAs has been determined by second-harmonic generation (SHG) for two-photon energies …