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Showing 1 to 1 of 1 for “"Cleanroom fabrication techniques"”.
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Hybrid metal-dielectric metasurfaces for enhanced optical performance
… two lithography steps, which increased the fabrication time and cost. There were also problems related to the LaserWriter, such as performance inconsistency due to the instability of its output energy and the stitching error, which affected the alignment between the two lithography steps. …