Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 30 for “"Cleanroom"”.
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Cleanroom design
… of control are used to develop what are called cleanrooms. Cleanrooms are used for the manufacture of a number of different kinds of products. The focus of this research will be on the microelectronics industry. This industry leads all other industries in developing systems, standards, and …
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Enhancing cleanroom operations: From preventive equipment maintenance to lethal chemical asset tracking
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2025-02-04 without embargo terms
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Optimization of the Process for Semiconductor Device Fabrication in the MicrON 636 Whittemore Cleanroom Facility
… Modu-lab toolset in the MicrON 636 Whittemore cleanroom facility. This toolset is designed to work with four-inch silicon wafers, in a class 10000 cleanroom. Early work on this process produced functioning devices, with low yield and little to no process control. Three aspects of the process …
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3D-Printed, Internally Fed Electrospray Thruster
… been manufactured through microfabrication in a cleanroom, which is both expensive and time-consuming, and is not compatible with in-space manufacturing. Advances in 3D printing technology make it possible to create microstructures at a much lower cost than microfabrication; however, internally …
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Particle generation in a chemical vapor deposition/plasma-enhanced chemical vapor deposition interlayer dielectric tool
… particle contamination were investigated: the cleanroom environment, improper wafer handling, the backside of the wafer, and microarcing during process.
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Sensor exploration for localization in cleanrooms
… within the context of the scientific labs called cleanrooms. The philosophy behind indoor localization is first broken down into three parts: presence detection, movement tracking and proximity sensing. The unique challenges for each of these parts facing the cleanroom environments are evaluated …
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Development of an Advanced Semiconductor Laboratory
… pMOS process integration on the toolset in the cleanroom facilities at Virginia Tech, and the development of a laboratory manual.
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Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells
… resonant pedestal sensor was fabricated in a cleanroom facility and used to measure the mass of an individual MDA-MB-231 (metastatic breast cancer) cell. The noisy mass measurements were subjected to two different processing methods: Savitzky-Golay and Moving Average. Our main goal in …
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Design, fabrication, and testing of a MEMS z-axis Directional Piezoelectric Microphone
… microphone was successfully fabricated in a cleanroom facility at The University of Texas at Austin. Testing procedures verified that the resonant frequency of the microphone, as expected, was much lower than in traditional microphones. This report discusses the theory, modeling, fabrication …
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Characterization of the photochemical etching process: an alternative microfluidic device fabrication method
… incorporation, and (3) eliminating the need for cleanroom use by relying on a projector- based optical setup that can be housed in any classroom or laboratory. PC etching optimization consists of analyzing etching parameter values in order to develop a recipe that provides the highest resolution …
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Fabrication and performance of broad-area high power narrow linewidth semiconductor laser diodes
… the Holonyak Micro and Nanotechnology Laboratory cleanroom using standard i-line optical lithography. Alternative lithography techniques are proposed without reliance on small feature definitions by electron-beam lithography. The buried grating lasers are characterized in terms of threshold …
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Experiments and Simulations of Autonomous Microscale Robotics
… control. Specifically, (i) I expanded upon the cleanroom-free autoperforation technology to allow facile metal patterning on 2D material surfaces, with which I fabricated mobile electronic microparticles; (ii) Based on experimental observations of autoperforated micro-architectures, I designed …
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Development of an automated and scalable lab-on-a-chip platform with on-chip characterization
… fabricating DMF devices that does not require a cleanroom facility: inkjet printing of silver electrodes on paper. We present new on-chip methods for characterizing the resistive forces that oppose drop movement on DMF and report the results from an initial screen of conditions, establishing the …
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Microplasma-Enabled Sputtering of Nanostructured Materials for the Agile Manufacture of Electronic Components
… processing that can damage printed surfaces. Cleanroom technology is unmatched in its ability to produce high-resolution, high-quality interconnects and electronic features, but it has rigid requirements. The best results require precision equipment, tightly controlled environments, and are …
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Development of an optical cavity-based biosensor for point-of-care diagnostics.
… optical cavity samples were fabricated in the cleanroom by using simple and inexpensive processes. Lights from low-cost laser diodes pass through the fabricated cavity and reach a CMOS camera. As proof-of-concept tests, the refractive index measurements and the detection of biotinylated bovine …
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Ar-Xe plasma laser and microplasma propagation
… µm were fabricated on silicon wafer using cleanroom fabrication technique. Microchannels were bounded by two up and down Au electrodes facing each other and a dielectric barrier discharge (DBD) structure was deployed for Ar-Xe plasma discharge. Stable plasma discharge was obtained from the …
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Stimulated Brillouin scattering in an on-chip microdisk resonator
… The fabrication work is carried out in the cleanroom in the Micro and Nanotechnology Laboratory at the University of Illinois. It is shown that the releasing of the microdisk with suitable undercut is the most challenging step due to the delicate suspended structure as well as the stress in …
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Getting under your skin. Development of wearable devices for improved non-invasive diagnostics
… device. Therefore, I redesigned the cleanroom fabrication methods used so far into fabrication for large scale manufacturing processes, ensuring that the benefitial effects previously mentioned are still maintained. Development of novel wearable devices will hopefully pave the way …
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Technological Development of Chemical Sensors for Healthcare and Safety Applications
… of its physical properties with conventional cleanroom techniques. A sacrificial layer assisted pattern transfer is reported in this thesis as a fabrication strategy for the reliable patterning of metallic structures of varying shape and dimension (down to the nm range) onto the elastomer. The …
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Thin film solar cells using all-electrodeposited ZnS, CdS and CdTe materials.
… chemistry laboratory instead of the conventional cleanroom that is very expensive to maintain. The electrodeposited materials were characterised for their structural, optical, electrical, morphological and compositional properties using x-ray diffraction, optical absorption, photoelectrochemical …
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