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Showing 1 to 1 of 1 for “"Clamped-Clamped Switches"”.
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Designing and Fabricating MEMS Cantilever Switches
In this thesis, MEMS switches actuated using electrostatic actuation is explored. MEMS switches that are lateral switches and clamped-clamped switches are designed, fabricated, and tested in this thesis. This thesis extensively explains the process by which the MEMS Switches were designed and …