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Showing 1 to 4 of 4 for “"Child-Langmuir"”.
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Adiabatic thermal Child-Langmuir flow
… steady-state one-dimensional adiabatic thermal Child-Langmuir flow theory. In this theory, a self-consistent Poisson equation is developed through the use of the fluid-Maxwell equations and an adiabatic equation of state. The adiabatic equation of state is also a statement of normalized rms …
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Radio frequency driven direct current electron beam source
… provided by the rf bias using collisionless Child-Langmuir rf sheath model with good agreement. The electron beam source is installed on an inductively coupled plasma etcher in an attempt to increase etch pattern transfer fidelity in silicon oxide feature etching. When used during CF4 plasma …
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Space-Charge Saturation and Current Limits in Cylindrical Drift Tubes and Planar Sheaths
… sheath is discussed and compared to the familiar Child-Langmuir law.
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Numerical analysis of radio-frequency sheath-plasma interactions in the ion cyclotron range of frequencies
… is consistent with the scaling derived from the Child-Langmuir law and the definition of the RF sheath potential. Lastly, a new finite element approach, which is named the finite element wave-packet method, is developed for the purpose of solving for multiscale plasma waves in the tokamak …