Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 2 of 2 for “"Chevron Thermal Actuator"”.
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MEMS enabled Fabry-Perot cavity for cQED experiments
… Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to …
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Design, Fabrication, and Characterization of a MEMS Based Thermally Actuated Fabry-Pérot Interferometer.
… QED research. This thesis describes a MEMS based thermally actuated Fabry-Pérot cavity interferometer that has potential as a displacement sensing mechanism for use in material testers and other devices which require motion feedback. Additionally the device has a potential application as a …