Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 159 for “"Chemical Vapor Deposition (CVD)"”.
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Chemical vapor deposition (CVD) growth and optimal transfer processes for graphene
… is required. Among various synthesis methods, chemical vapor deposition (CVD) has been a focus of attention as the most promising and cost-efficient deposition techniques, with advantages of its excellent repeatability and controllability, to produce large area graphene crystals on transition …
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Metal complexes with ω-alkenyl ligands. synthesis, structure, reactivity, and applications in chemical vapor deposition (CVD) and hydrosilylation catalysis
… the potential applications of these complexes in chemical vapor deposition (CVD) and catalysis are described. Chapter 1 is a brief overview of the synthesis, structure, fluctuational behaviors and general reactivities of complexes with η1-σ-η2-alkene chelating ligands. Chapter 2 describes the …
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Segregation and Phase Dynamics in Supported Bimetallic Nanoparticles
… a silicon monolayer deposited on Pt(111) by chemical vapor deposition (CVD) using silane (SiH$\sb4)$ is described. Using Auger electron spectroscopy (AES), Si was found to readily diffuse into the Pt substrate and sequentially form at least two unique intermetallic Pt-Si surface structural …
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To Study the Effect of Catalyst on the Physical Parameters of Carbon Spheres
… area and uniformity were grown using the Chemical Vapor Deposition (CVD) process with silicon substrates, ethylene (C2H4) as a carbon precursor and argon as the inert gas. We observe that the morphology of carbon spheres largely depend on the experimental conditions, including CVD time …
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Kinetic optimization of titanium silicide chemical vapor deposition
… interest has arisen in fabrication by chemical vapor deposition (CVD) because of scalability problems with the salicide process (a Ti-Si solid-phase reaction) that currently defines the state-of-the-art. Furthermore, the possibility of selective CVD on Si vs SiO$\sb 2$ offers the …
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Phases, microstructures, and microchemistry of silicon carbide-based ceramics
… opaque regions of high purity bulk SiC grown by chemical vapor deposition (CVD) were characterized for physical properties as well as for microstructure and chemical purity to correlate the degree of optical transparency with other material characteristics. A good correlation was obtained between …
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Atomistic modeling and simulations of 2D materials : chemical vapor deposition, nanoporous defects, force-field development, wetting, and friction
… model for the growth of TMD monolayers using chemical vapor deposition (CVD). Combining kinetic Monte Carlo (KMC) simulations and a chemical engineering transport model, I am able to predict the experimentally-observed shape and size evolution of the MoS₂ morphology inside a CVD reactor. …
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Defect-driven processing of two-dimensional transition metal dichalcogenides
… of the role of substrate temperature in two-step chemical vapor deposition (CVD) growth of MoS₂/WS₂ heterostructures. We demonstrate diffusion-mediated synthesis of inverted lateral heterostructures following low MoS2 growth temperatures in the second CVD step and homogeneous Mo[subscript …
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Structure-property engineering and device fabrication of conjugated polymers by chemical vapor deposition
… focuses on the in-situ molecular engineering of chemical vapor deposition (CVD)-synthesized soft materials and device applications. High quality and large-scale synthesis of soft materials are the foundation of soft electronics. CVD approach has proved to be a low-cost and scalable technique to …
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Iron (III) Chloride doping of large-area chemical vapor deposition graphene
Chemical doping is an effective method of reducing the sheet resistance of graphene. This thesis aims to develop an effective method of doping large area Chemical Vapor Deposition (CVD) graphene using Iron (III) Chloride (FeCl 3). It is shown that evaporating FeCl3 can increase the carrier …
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Analyzing manufacturing methods of carbon nanotubes for commercialization
… The most commonly used techniques of chemical vapor deposition (CVD), arc discharge, and laser ablation are discussed in detail with emphasis placed on three criteria: cost, rate, and flexibility. Satisfactory achievement in these three areas will result in the ability to have carbon …
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Synthesis of bilayer graphene and hexagonal boron nitride by chemical vapor deposition method
… method for synthesizing bilayer graphene using chemical vapor deposition (CVD) method and to understand the growth mechanism. The second part involves exploring methods of synthesizing hexagonal boron nitride (hBN). The successful isolation of monolayer graphene in 2004 has attracted many …
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Spectroscopic Measurements of Doping and Strain at Two-Dimensional Material Interfaces
… Here I report Raman spectroscopy measurements of chemical vapor deposition (CVD) grown graphene transferred to a number of relevant substrates and freestanding, as well as commercially available graphene, in order to study the variation in charge doping and strain between these samples. I utilize …
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Thermal and dynamic processes in deposition, growth, and etching of materials: I. Thermal and collision-induced activation of alkyl intermediates on aluminum. II. Chemical vapor deposition and growth of silicide on copper
Chemical vapor deposition (CVD) is becoming an increasingly important manufacturing process for the fabrication of VLSI and ULSI devices. A major challenge in optimizing a CVD process is developing an understanding of the complex mechanistic pathways followed. The first section in this thesis …
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CVD Grown Graphene-Based Materials: Synthesis, Characterization and Applications
… electrical, mechanical, thermal, optical and chemical properties. However, its zero bandgap is a limitation for electronics applications and its two-dimensional (2D) nature is a limitation for large scale, volumetric and macroscopic applications. Doping graphene with heteroatoms and creating …
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Low-Temperature Chemical Vapor Deposition of Ruthenium and Manganese Nitride Thin Films
… miniaturization, conformal, low-temperature deposition of new electronic materials is needed. Two techniques capable of conformality have emerged: chemical vapor deposition (CVD) and atomic layer deposition (ALD). Here, two processes for deposition of materials which could be useful in …
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Synthesis and characterization of graphene-palladium thin film composites for nano-gilding
… properties, as well as being useful for chemical functionalities. A few layers of graphene are extremely lightweight but highly multifunctional, and as such present an opportunity to add increasing performance to engineering design. However, it is difficult to uniformly apply a few layers …
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Choosing a gate dielectric for graphene based transistors
… are examined for use in graphene transistors. Evaporated HfO2 is ultimately used as the gate dielectric for graphene field effect transistors (FETs) on six different graphene samples. Two types of graphene were used: graphene made from the sublimation of SiC and epitaxial graphene synthesized by …
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Chemical vapor deposition of organosilicon and sacrificial polymer thin films
Chemical vapor deposition (CVD) produced films for a wide array of applications from a variety of organosilicon and organic precursors. The structure and properties of thin films were controlled by varying processing conditions such as the method and power of precursor activation, pressure, flow …
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Synthesis, Structure and Properties of Various Carbon Nanomaterials
… thanks to their exceptional electrical, optical, chemical, and mechanical properties, and thus they have become promising for a diverse array of applications. More importantly, the properties of a specific carbon nanomaterial are often determined by the structure of the material itself, which …
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