Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 2 of 2 for “"Chamber matching"”.
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Chamber matching in semiconductor manufacturing using statistical analysis and run-to-run control
This thesis focuses on a chamber matching methodology for semiconductor manufacturing in Analog Devices Inc.'s fabrication sites. As ADI extends its efforts to implement Internet of Things and predictive maintenance (PdM) to its fabrication facilities, it is also seeking to increase their overall …
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Process modeling and optimization using industrial semiconductor fabrication data
… conditions, throughput, number of reaction chambers operating in parallel, metrology, and data collection. These differences are reflected in the data available in the fab databases. This research explores the use of a neural network modeling and genetic algorithm optimization method with …