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Showing 1 to 2 of 2 for “"Ceramics thin films"”.

  1. Influence of design and coatings on the mechanical reliability of semiconductor wafers.

    … factors of wafers and the effect on strength. Thin, solid, pre-stressed films are proposed as a means to improve the bulk mechanical properties of a wafer. Three-point bending was used to evaluate the laser scribe density and chemical processing effect on wafer strength. Drop and strike tests …

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