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Showing 1 to 1 of 1 for “"Capacitive interface circuit"”.
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In situ monitoring of reactive ion etching using a surface micromachined integrated resonant sensor
… The integration of sensors and electronic circuitry is a dominant trend in the semiconductor industry, and much work and research has been devoted to this effort. The RIE sensor relies on capacitive transduction to detect small capacitance changes and the resulting change in resonant …