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Showing 1 to 1 of 1 for “"Capacitive MEMS Device"”.
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Stretchable, multimodal, large-area sensor arrays fabricated using excimer laser photoablation technologies
… a uniaxial stretchability of up to 50%. Numerous capacitive MEMS devices, including pressure sensors, shear stress sensors, and condenser microphones, have been modeled and fabricated. Individual 200 μm capacitive sensors show a capacitance change of 60 fF with an applied pressure of 500 kPa; …