Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 5 of 5 for “"CMOS MEMS"”.
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Modelling and Design Optimisations of CMOS MEMS Single Membrane Thermopile Detector Arrays
… on Complementary Metal-Oxide-Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) technology are widely used across consumer and industrial applications. The combination of CMOS and MEMS technologies allows for the production of devices with high performance, good reliability and …
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Modeling and characterization of microelectromechanical systems condenser microphone
MEMS Condenser microphones are becoming a promising technology to substitute the current standard microphones as they have several benefits such as batch fabrication, integration feasibility, low noise level, stable frequency response and high sensitivity; so their demand is increasing and is …
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Monolithic Integration of Fluidics, Electronics, and Photonics using CMOS Foundry Processes
… the past decade, the fabrication capabilities of CMOS (complementary metal-oxide-semiconductor) foundries have been successfully applied to next-generation sequencing systems to simultaneously lower the cost, miniaturize the footprint, and improve the throughput of the instrument. By utilizing …
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Monolithically integrated MEMS resonators and oscillators in standard IC technology
… monolithically integrated, GHz-frequencies CMOS-MEMS resonators is presented. No post-processing or special packaging of any kind is required beyond the standard CMOS process. Resonant body transistor (RBT) is constructed by using active field-effect-transistor (FET) sensing. A phononic …
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Design and fabrication of a MEMS-array pressure sensor system for passive underwater navigation inspired by the lateral line
… array of microelectromechanical systems (MEMS) pressure sensors built in KOH-etched silicon and HF-etched Pyrex wafers. A novel strain-gauge resistor design is discussed, and standard CMOS/MEMS fabrication techniques were used to build sensors based on the strain-gauge resistors and thin …