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Showing 1 to 1 of 1 for “"Borate Films"”.
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New Chemistry For The Growth Of First-Row Transition Metal Films By Atomic Layer Deposition
<p>Thin films containing first-row transition metals are widely used in microelectronic, photovoltaic, catalytic, and surface-coating applications. In particular, metallic films are essential for interconnects and seed, barrier, and capping layers in integrated circuitry. Traditional vapor …