Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 5 of 5 for “"Block copolymer directed self-assembly"”.
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Coarse grained molecular dynamic of block copolymer directed self assembly on topographic substrate
Directed self-assembly (DSA) of block copolymer (BCP) is a promising and economic method of manufacturing periodic lamellar patterns on wafer that is widely used in semi-conductor and electronic fields. In BCP DSA lithography, same as issues in achieving defective free patterns and smooth edges, an …
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Algorithms for DFM in electronic design automation
… lithography (EUV), electron beam (E-beam), and block copolymer directed self-assembly (DSA); however, DFM algorithms are essential for them to achieve better printability of a design. In this dissertation, we focus on analyzing the compatibility of designs and various advanced lithography …
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Layout decomposition for triple patterning lithography
… lithography, {\em E-beam direct write}, and {\em block copolymer directed self-assembly} (DSA). However, the source power for EUV is still an unresolved issue. The low throughput of E-beam makes it impractical for massive productions. DSA is still under calibration in research labs and is not …
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Mesoscale simulation of block copolymer phase separation and directed self-assembly processes: Applications for semiconductor manufacturing
A molecular dynamics coarse-grained block copolymer (BCP) model was developed and used to studied directed self-assembly (DSA), especially in regards to applications for semiconductor manufacturing. Most of the thesis is spent investigating the effect that guiding layer properties and block …
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Design automation algorithms for advanced lithography
… (EUV), electron beam lithography (EBL) and directed self-assembly (DSA). While these new technologies create enormous opportunities, they also pose great design challenges due to their unique process characteristics and stringent constraints. In order to smoothly adopt these advanced …