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Showing 1 to 1 of 1 for “"Bimorph cantilevers"”.
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Optimization studies of thermal bimorph cantilevers, electrostatic torsion actuators and variable capacitors
… given for three kinds of MEMS devices: thermal bimorph cantilevers, electrostatic torsion actuators, and variable capacitors. Calculation, simulation, and experimental data are used to confirm the device behavior and demonstrate the application of the design approaches. For thermal bimorph …