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Showing 1 to 1 of 1 for “"Bcl3/sf6 plasma"”.
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CHARACTERIZATION OF BCl₃, SF₆, and BCl₃/SF₆ PLASMAS USING LANGMUIR PROBE MEASUREMENTS
A Langmuir probe study in BCl3, SF6, and mixtures of BCl3/SF6 capacitively-coupled plasmas is presented. In this study, energy distribution functions, electron temperatures (and average electron energy) and electron, positive ion, and negative ion densities were determined as a function of process …