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Showing 1 to 1 of 1 for “"Atmospheric Pressure ALD"”.
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Ultraviolet-Assisted Atmospheric-Pressure Spatial Atomic Layer Depositions for Tuning ZnO Properties
… investigates the development of UV-assisted Atmospheric Pressure Spatial Atomic Layer Deposition (UV-APSALD) as a technique for depositing ZnO films. A study of the current literature identifies the need for high-quality metal oxide thin films; metal oxides are near ubiquitous in modern day …