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Showing 1 to 10 of 10 for “"Aluminum nitride (AlN)"”.
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Superconducting nanowire single-photon detectors on aluminum nitride photonic integrated circuits
… processing. Among various waveguide materials, aluminum nitride (AlN) is a promising candidate because of its exceptionally wide bandgap, and intrinsic piezoelectric and electro-optic properties. In this Master's thesis, we developed a complete fabrication process for making high-performance …
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Quantum acoustics with a released thickness-mode mechanical resonator
… thickness-mode mechanical resonator based on an aluminum nitride (AlN)-on-silicon (Si) platform. The device is designed to achieve strong piezoelectric coupling to a superconducting qubit. The resonator, with a lateral dimension of approximately $200\times200$ $\mu m^2$, is fully released from …
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Texture evolution in metal nitride (aluminum nitride, titanium nitride, hafnium nitride) thin films prepared by off-normal incidence reactive magnetron sputtering
… the development of crystallographic texture in aluminum nitride (AlN), titanium nitride (TiN) and hafnium nitride (HfN) films deposited by off-normal incidence reactive magnetron sputtering at room temperature in N2/Ar mixtures. Texture measurements were performed by x-ray pole figure analysis …
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Low Loss Integrated Photonic Devices and Their Applications in Astrophotonics and Quantum Information
The silicon nitride (Si3N4) integration platform for photonics is becoming a low-loss and compact platform for various applications such as astrophotonics and quantum information. In this dissertation, the fabrication techniques for low loss integrated photonics devices is first discussed. Then, we …
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Development of a selective substrate metallization process via electorless gel plating
… by new high performance materials such as aluminum nitride (AlN) and beryllia (BeO). AlN's thermal conductivity is an order of magnitude greater than alumina and it has a thermal expansion coefficient very close to silicon. Metallization is used to generate areas for wire and die bonding …
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Optimization and design of radio frequency piezoelectric MEMS resonators
… frequencies on a single chip. In particular, aluminum nitride (AlN) resonators based on fundamental symmetric (S0) Lamb mode have shown great promise because they can offer high phase velocities (10,000 m/s), low dispersive phase velocity characteristic, small temperature-induced frequency …
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Switchmode Power Supply Miniaturization with Emphasis on Integrated Passive Components on Prefired High Performance Ceramic Substrates
… passive components (capacitors and resistors) on AlN have been developed. Also, guidelines for the design implementation and steps necessary to integrate these passive components on prefired alumina (Al2O3) and aluminum nitride (AlN) ceramic surfaces, for power electronic applications, have been …
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Design and fabrication of a prototype aluminum nitride-based pressure sensor with finite element analysis and validation
… an innovative prototype pressure sensor based on Aluminum Nitride (AlN) Surface Acoustic Wave (SAW) and Shear Horizontal (SH)-SAW. This AlN-based device has unique superiority over other SAW devices, including relatively lower cost, higher sensitivity, intrinsically higher reliability, more …
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Aluminum nitride microelectromechanical infrared detectors with integrated metamaterial absorbers
… structures with microelectromechanical (MEMS) AlN resonators. Historically, uncooled absorbers have been limited in two key metrics: selectivity, the ability to distinguish distinct wavelengths of incident light, and sensitivity, the ability to detect low level amounts of radiation. In recent …
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Reststrahlen band optics for the advancement of far-infrared optical architecture
… are made of gold 1D gratings patterned atop aluminum nitride films with molybdenum ground planes beneath. These devices exhibited strong selective absorption that could be tuned by choice of gold grating width. This single parameter was shown to provide absorption resonance tuning across a …