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Showing 1 to 1 of 1 for “"Aluminum Oxide / Hafnium Oxide Nanolaminate Coatings"”.
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Nanolaminate coatings to improve long-term stability of plasmonic structures in physiological environments
… plasmonic structures based on Al and Cu, nanolaminate coatings are investigated to improve their long-term stability in corrosive physiological environments. The structures are fabricated using phase-shifting PDMS masks, e-beam deposition, RIE, Atomic Layer Deposition and Rapid Thermal …