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Showing 1 to 1 of 1 for “"Aluminium Dotierung"”.
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Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxid-Schichten für Silizium-Dünnschichtsolarzellen
This thesis addresses the development of aluminum doped zinc oxide (ZnO:Al) films by reactive sputter deposition. The study focuses on the relation between deposition conditions and the resulting electrical, optical and structural film properties. The structure of the ZnO:Al films strongly affects …