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Showing 1 to 1 of 1 for “"Alteration of resistivity"”.
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Effect Of Annealing On Copper Thin Films:the Classical Size Effect And Agglomeration
With continued shrinking of CMOS technology to reduce the gate delay times, an increase in the resistivity of the metal corresponding to the wire dimension is a concern. This phenomenon of increase in resistivity with decreasing dimension of the thin metallic film or interconnect is known as the …