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Showing 1 to 1 of 1 for “"AlN Surface Acoustic Wave Device, Finite Element Simulation, Pressure Sensor"”.
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Design and fabrication of a prototype aluminum nitride-based pressure sensor with finite element analysis and validation
… surgeons remain deficient, especially for the pressure sensing which plays an important role. Inspired by our previous work on bacterial sensing, in the current work I have designed, fabricated, analyzed, and evaluated an innovative prototype pressure sensor based on Aluminum Nitride (AlN) …