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Showing 1 to 1 of 1 for “"AlN, RF MEMS, piezoelectric, resonator"”.
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Optimization and design of radio frequency piezoelectric MEMS resonators
Radio frequency (RF) microelectromechanical system (MEMS) resonators employing Lamb waves propagating in piezoelectric thin films have recently attracted much attention since they combine the advantages of the bulk acoustic wave (BAW) and surface acoustic wave (SAW) technologies: high phase …