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Showing 1 to 3 of 3 for “"Al2O3 thin film"”.
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Synthesis and thermoelectric properties of Mg2Si-Mg2Sn solid solutions for waste heat recovery
… demonstrated that the atomic-layer deposited Al2O3 coating can effectively protect Mg2Si0.4Sn0.6 from oxidation in inert gas and even in air. This Al2O3 thin-film coating also provides in situ protection to Mg2SixSn1−x during the laser flash measurement and therefore eliminates the measurement …
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Microplasma-driven, atomic layer deposition of flexible electronic and photonic nanofilms
Atomic Layer Deposition (ALD) of aluminum oxide (Al2O3), gallium oxide (Ga2O3) and Zirconium oxide (ZrO2), driven by arrays of microcavity plasmas (MALD), has been demonstrated. Microplasma has been drawn attention due to its unique characteristics such as high electron density (>1016 cm-3), low …
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Al 2 O 3 thin films: relation between structural evolution, mechanical properties and stability
… properties, and stability was investigated for Al2O3 thin films. The existence of different polymorphs of this material offers a range of properties for applications, but also meets the process control challenges when the formation of phase pure material is desired. The aim of this work is to …