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Showing 1 to 2 of 2 for “"Aerial Image Simulation"”.
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Design-technology co-optimization in next generation lithography
… electronbeam, directed self-assembly) • new simulation and verification approach (e.g. process windows optical proximity correction, parallel simulation) Corresponding to these four research directions, in this dissertation, we propose our research topics as follows: • Self-aligned double …
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New methods for electronic design automation problems
… better results in terms of quality and runtime. Aerial image simulation is a fundamental problem in the regular lithographyrelated process. Since it requires a huge amount of mathematical computation, an efficient yet accurate implementation becomes a necessity. In the literature, GPU or FPGA has …